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EE 505 - MEMS
(Odd Spring)
Course Description
| | This course introduces students to
microfabrication of electrical and mechanical devices. The theory of
various mechanical transducers and physical sensors including optical
MEMS, RF MEMS, and Bio/Chemical MEMS are discussed. |
Textbook
| | Foundations of MEMS, (Required) |
| | by Chang Liu |
| | Pearson Prentice Hall, 2006 |
Pre-Requisites
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