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Contact Us
Course Staff


Dr. Todd J. Kaiser
531 Cobleigh Hall
Bozeman, MT 59717

Tel: (406) 994-7276
Fax: (406) 994-5958

Teaching Assistant

Eric Gowens
511 Cobleigh Hall
Bozeman, MT 59717

Tel: (406) 994-2832
Fax: (406) 994-5958

EE 505 - MEMS
(Odd Spring)

Course Information

Course Description

This course introduces students to microfabrication of electrical and mechanical devices. The theory of various mechanical transducers and physical sensors including optical MEMS, RF MEMS, and Bio/Chemical MEMS are discussed.


Practical MEMS, (Required)
by Ville Kaajakari
Small Gear Publishing, 2009


EE409 or equivalent

View Text-only Version Text-only Updated: 1/4/2011
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