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EE 407 - Introduction to Microfabrication
(Spring)
Course Description
| | This course provides an introduction to
clean room safety protocol and micro fabrication. Lectures will
introduce micro fabrication methods, models and equipment. Laboratories
will perform the steps to produce and characterize a
metal-oxide-semiconductor transistor. |
Textbook
| | Introduction to Microelectroinc Fabrication 2e, (Required) |
| | by Richard C. Jaeger |
| | Prentice Hall, 2002 |
Pre-Requisites
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