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Contact Us
David L. Dickensheets
Professor
530 Cobleigh Hall
Bozeman, MT 59717

Tel: (406) 994-7874
Fax: (406) 994-5958
davidd@ece.montana.edu

ECE Department
Montana State University
610 Cobleigh Hall
Bozeman, MT 59717

Tel: (406) 994-2505
Fax: (406) 994-5958
eedept@ee.montana.edu www.coe.montana.edu/ee

> College of Engineering > Electrical & Computer Engineering Department
Montana Microfabrication Facility

The Montana Microfabrication Facility (MMF) is a shared use cleanroom facility at Montana State University. Most of the devices developed as part of Prof. Dickensheets' research were fabricated in the MMF. 

Capabilities of the MMF include thin films deposition (sputtered, evaporated, thermally grown, spincast), lithography (contact optical lithography and e-beam lithography) and etching (wet processing, plasma and reactive ion etching). 

Professor Dickensheets is the Director of the MMF, which is managed by Dr. Phil Himmer. For more information please visit the MMF webpage.

 


View Text-only Version Text-only Updated: 03/18/2009
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