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Montana Microfabrication Facility
Montana Microfabrication Facility (MMF) is a shared use cleanroom facility
at Montana State University. Most of the devices developed as part of Prof.
Dickensheets' research were fabricated in the MMF.
of the MMF include thin films deposition (sputtered, evaporated, thermally
grown, spincast), lithography (contact optical lithography and e-beam
lithography) and etching (wet processing, plasma and reactive ion
Dickensheets is the Director of the MMF, which is managed by Dr. Phil
Himmer. For more information please visit the MMF